Fabrication

Here you can find lists of great Fabrication books are or have been used to teach courses at MIT.





Silicon VLSI Technology: Fundamentals, Practice and Modeling

By: James D. Plummer, Michael Deal, Peter B. Griffin

2000

The Science and Engineering of Microelectronic Fabrication

By: Stephen A. Campbell

2001

Silicon Processing for the VLSI Era, Vol. 1: Process Technology

By: Stanley Wolf, Richard N. Tauber

1999

VLSI Technology

By: Simon Sze

1988

VLSI Fabrication Principles: Silicon and Gallium Arsenide, 2nd Edition

By: Sorab K. Ghandhi

1994

Physics and Technology of Semiconductor Devices

By: A. S. Grove

1991

Microelectronics: Processing and Device Design

By: Roy A. Colclaser

1980

Thin Film Processes

By: John L. Vossen, Werner Kern

1979

Electronic Materials Science: For Integrated Circuits in SI and GaAs

By: James W. Mayer, S. S. Lau

1989

Electronic Materials: Science and Technology

By: Shyam P. Murarka, Martin C. Peckerar

1989

Materials Science of Thin Films: Depositon and Structure

By: Milton Ohring

2001

Microsystem Design

By: Stephen D. Senturia

2000

Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

By: Marc J. Madou

2002

Micromachined Transducers Sourcebook

By: Gregory T. Kovacs

1998

Fund Semiconductor Fabrication

By: Gary S. May

2003

Thin-Film Deposition: Principles and Practice

By: Donald Smith

1995