MEMS

Here you can find lists of great MEMS books are or have been used to teach courses at UC Berkeley.





Microsystem Design

By: Stephen D. Senturia

2000

Micromachined Transducers Sourcebook

By: Gregory T. Kovacs

1998

Introduction to Microelectronic Fabrication: Volume 5

By: Richard Jaeger

2001

Foundations of MEMS

By: Chang Liu

2011

An Introduction to Microelectromechanical Systems Engineering, Second Edition

By: Nadim Maluf, Kirt Williams

2004

Modeling MEMS and NEMS

By: John A. Pelesko, David H. Bernstein

2002